Application of Ion Plating to Obtain Conductive and Transparent Thin Films of Indium and Tin Oxides.

被引：0

作者：

Machet, J. ^{[1
]}

Guille, J. ^{[1
]}

Robert, S. ^{[1
]}

Pauliat, A. ^{[1
]}

机构：

[1] UER des Sciences, Limoges, Fr, UER des Sciences, Limoges, Fr

来源：

Vide, les Couches Minces | 1983年 / 38卷 / 218期

关键词：

FILMS - Metallic - METALLIC COMPOUNDS - Plating - OXYGEN - SUBSTRATES - TIN COMPOUNDS - Thin Films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We study the realization by reactive ion plating of transparent and conductive thin films. Indium and tin are evaporated separately by Joule effect in presence of an rf disharge obtained in pure oxygen. The proportions of indium and tin oxides in the films are determined by controlling the rate of evaporation of these two metals by spectroscopic analysis of the light emitted in the discharge. The substrates are heated, in situ, during the deposition cycle, and thus all annealing are avoided. The electrical resistivity is 5. 10** minus **6 OMEGA . m. The transparency of a film 0. 5 mu m thick is greater than 85% in the visible region.

引用

页码：405 / 408

共 50 条

[21] Al-ZnO thin films as transparent conductive oxides : Synthesis, characterization, and application tests
Jeong, Seong Hun
Park, Bit Na
Yoo, Dong-Geun
Boo, Jin-Hyo
Jung, Donggeun
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 50 (03) : 622 - 625
[22] Advances in Tin Based Transparent Conductive Oxides for Thin Film Photovoltaic Applications
Cording, Christopher R.
PHOTOVOLTAIC CELL AND MODULE TECHNOLOGIES II, 2008, 7045
[23] Pulsed laser deposition of conductive indium tin oxide thin films
I. A. Petukhov
A. N. Shatokhin
F. N. Putilin
M. N. Rumyantseva
V. F. Kozlovskii
A. M. Gaskov
D. A. Zuev
A. A. Lotin
O. A. Novodvorsky
A. D. Khramova
Inorganic Materials, 2012, 48 : 1020 - 1025
[24] Pulsed laser deposition of conductive indium tin oxide thin films
Petukhov, I. A.
Shatokhin, A. N.
Putilin, F. N.
Rumyantseva, M. N.
Kozlovskii, V. F.
Gaskov, A. M.
Zuev, D. A.
Lotin, A. A.
Novodvorsky, O. A.
Khramova, A. D.
INORGANIC MATERIALS, 2012, 48 (10) : 1020 - 1025
[25] PREPARATION OF UNSUPPORTED THIN FILMS OF OXIDES.
Horibe, Toshiyasu
Kuwabara, Senzo
Yogyo Kyokai Shi/Journal of the Ceramic Society of Japan, 1985, 93 (11): : 739 - 742
[26] Ionic Liquid-Assisted Ink for Inkjet-Printed Indium Tin Oxide Transparent and Conductive Thin Films
Pan, Yuan
Liu, Mengxin
Lu, Chengzeng
Liu, Bowen
Shao, Wei
Pan, Daocheng
Shi, Xinan
LANGMUIR, 2023, 39 (14) : 5107 - 5114
[27] PHYSICAL-PROPERTIES OF CHEMICALLY SPRAYED TIN OXIDE AND INDIUM TIN OXIDE TRANSPARENT CONDUCTIVE FILMS
DEMICHELIS, F
MINETTIMEZZETTI, E
SMURRO, V
TAGLIAFERRO, A
TRESSO, E
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (09) : 1825 - 1832
[28] The Effect of Annealing on Nanothick Indium Tin Oxide Transparent Conductive Films for Touch Sensors
Chan, Shih-Hao
Li, Meng-Chi
Wei, Hung-Sen
Chen, Sheng-Hui
Kuo, Chien-Cheng
JOURNAL OF NANOMATERIALS, 2015, 2015
[29] Highly ultraviolet transparent textured indium tin oxide thin films and the application in light emitting diodes
Chen, Zimin
Zhuo, Yi
Tu, Wenbin
Ma, Xuejin
Pei, Yanli
Wang, Chengxin
Wang, Gang
APPLIED PHYSICS LETTERS, 2017, 110 (24)
[30] Electrochemically Assisted Deposition as a New Route to Transparent Conductive Indium Tin Oxide Films
Kovtyukhova, Nina I.
Mallouk, Thomas E.
CHEMISTRY OF MATERIALS, 2010, 22 (17) : 4939 - 4949

← 1 2 3 4 5 →