Crystallization of amorphous silicon nitride obtained by the method of SiCl4 ammonolysis

The purpose of the paper was to develop an original method of producing a micropowder of silicon nitride utilizing the reaction between NH3 and SiCl4 and to explain the course of crystallization process of amorphous Si3N4. A method of producing the powder of silicon nitride consisting in heating the products of the ammonolysis of silicon tetrachloride at a temperature of 1370-1540°C in nitrogen atmosphere has been presented. The silicon nitride powders obtained in that way are amorphous, what, under conditions appropriate for their crystallization, enables to investigate the crystallization process of amorphous silicon nitride. In the experimental section the apparatus and the method and conditions of carrying out the synthesis of the silicon nitride powder are described. The crystallization of amorphous silicon nitride was performed within the temperature range 1370-1540°C.