Preparation of ultrasharp diamond tip emitters by ion-beam etching

被引：0

作者：

Stepanova, A.N.

Givargizov, E.I.

Bormatova, L.V.

Zhirnov, V.V.

Mashkova, E.S.

Molchanov, A.V.

机构：

来源：

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 02期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

共 50 条

[31] Field emission energy distributions of electrons from tungsten tip emitters coated with diamond-like film prepared by ion-beam deposition
Pshenichnyuk, SA
Yumaguzin, YM
DIAMOND AND RELATED MATERIALS, 2004, 13 (01) : 125 - 132
[32] ION-BEAM ENHANCED MAGNETRON REACTIVE ION ETCHING
CHINN, JD
APPLIED PHYSICS LETTERS, 1987, 51 (24) : 2007 - 2009
[33] ION-BEAM ETCHING OF INP .1. AR ION-BEAM ETCHING AND FABRICATION OF GRATING FOR INTEGRATED-OPTICS
YUBA, Y
GAMO, K
TOBA, H
XI, GH
NAMBA, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (07): : 1206 - 1210
[34] REACTIVE ION-BEAM ETCHING WITH CHLORINATED GASES - BEAM CHARACTERIZATION AND ETCHING OF ALUMINUM
STEINBRUCHEL, C
JOURNAL OF APPLIED PHYSICS, 1986, 59 (12) : 4151 - 4157
[35] REDEPOSITION - FACTOR IN ION-BEAM ETCHING TOPOGRAPHY
CHAPMAN, RE
JOURNAL OF MATERIALS SCIENCE, 1977, 12 (06) : 1125 - 1133
[36] ION-BEAM UTILIZATION FOR ETCHING AND FILM DEPOSITION
WEISSMANTEL, C
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1976, 31 (183): : 107 - 116
[37] OXYGEN ION-BEAM ETCHING FOR PATTERN TRANSFER
GOKAN, H
ITOH, M
ESHO, S
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (01): : 34 - 37
[38] ION-BEAM ASSISTED ETCHING OF ALUMINUM WITH CHLORINE
TSOU, LY
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C87 - C87
[39] Ion-Beam Etching Techniques in Uranium Metallography
Frafjord, J. J.
Bridges, R. L.
Dekanich, S. J.
MICROSCOPY AND MICROANALYSIS, 2009, 15 : 790 - 791
[40] LOW-ENERGY ION-BEAM ETCHING
HARPER, JME
CUOMO, JJ
LEARY, PA
SUMMA, GM
KAUFMAN, HR
BRESNOCK, FJ
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C108 - C109

← 1 2 3 4 5 →