Preparation of ultrasharp diamond tip emitters by ion-beam etching

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Stepanova, A.N.
Givargizov, E.I.
Bormatova, L.V.
Zhirnov, V.V.
Mashkova, E.S.
Molchanov, A.V.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 02期
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