Study of a pulsed DC glow-discharge used for plasma-CVD with an ultrafast videosystem and a langmuir-probe

被引：0
|
作者：
Beer, T.A. [1 ]
Heim, D. [2 ]
Laimer, J. [1 ]
Störi, H. [1 ]
机构：
[1] Institut für Allgemeine Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, A-1040 Wien, Austria
[2] Rübig GmbH and Co. KG, Schafwiesenstrasse 56, A-4600 Wels, Austria
来源：
Materials Science Forum | 1998年 / 287-288卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：299 / 302
相关论文
共 14 条
  • [1] Study of a pulsed DC glow-discharge used for Plasma-CVD with an ultrafast videosystem and a Langmuir-probe
    Beer, TA
    Heim, D
    Laimer, J
    Stori, H
    TRENDS AND NEW APPLICATIONS OF THIN FILMS, 1998, 287-2 : 299 - 301
  • [2] IMPEDANCE PROBE AND DC PROBE STUDIES ON PLASMA OF A GLOW-DISCHARGE
    SEN, C
    BASU, J
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (02) : 172 - 183
  • [3] Langmuir-probe measurements of a pulsed and steady-state rf glow-discharge source and of an rf planar-magnetron source
    Heintz, MJ
    Hieftje, GM
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1996, 51 (13) : 1629 - 1646
  • [4] THE EFFECT OF GLOW-DISCHARGE CHARACTERISTICS ON THE PROPERTIES OF PLASMA-CVD SILICON-NITRIDE FILMS
    HIRAIWA, A
    MUKAI, K
    TAKAHASHI, S
    HARADA, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C104 - C105
  • [5] DESIGN AND EVALUATION OF A COMPUTER-CONTROLLED LANGMUIR PROBE SYSTEM FOR GLOW-DISCHARGE PLASMA DIAGNOSTICS
    FANG, DC
    WILLIAMS, RR
    MARCUS, RK
    JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1990, 5 (06) : 569 - 573
  • [6] ELECTROSTATIC-PROBE MEASUREMENTS IN THE GLOW-DISCHARGE PLASMA OF A DC MAGNETRON SPUTTERING SYSTEM
    PETROV, I
    ORLINOV, V
    IVANOV, I
    KOURTEV, J
    CONTRIBUTIONS TO PLASMA PHYSICS, 1988, 28 (02) : 157 - 167
  • [7] Time function triple Langmuir probe measurements in low frequency pulsed DC discharge plasma
    Farooq, M. U.
    Ali, A.
    Qayyum, A.
    Naz, M. Y.
    Khan, Y.
    Shukrullah, S.
    Ghaffar, Ch. A.
    HIGH ENERGY CHEMISTRY, 2015, 49 (04) : 286 - 293
  • [8] Time function triple Langmuir probe measurements in low frequency pulsed DC discharge plasma
    M. U. Farooq
    A. Ali
    A. Qayyum
    M. Y. Naz
    Y. Khan
    S. Shukrullah
    Ch. A. Ghaffar
    High Energy Chemistry, 2015, 49 : 286 - 293
  • [9] Theoretical model for study of the voltage-current curve of a Langmuir-probe used in the hot region of the ECR plasma
    Kenez, L.
    Karacsony, J.
    Derzsi, A.
    Biri, S.
    PHYSICS LETTERS A, 2008, 372 (29) : 4927 - 4931
  • [10] Excitation of Dust-Acoustic Waves in a DC Glow-Discharge Dusty Plasma by Means of Pulsed Gasdynamic Stimulation
    M. Yu. Pustyl'nik
    V. M. Torchinskii
    V.I. Molotkov
    A. G. Khrapak
    A. V. Chernyshev
    O.F. Petrov
    V. E. Fortov
    M. Okubo
    K. Yoshino
    High Temperature, 2004, 42 : 659 - 666
12