Simple non-destructive technique to detect micropipes in silicon carbide

被引：0

作者：

Morrison, D.J. ^{[1
]}

Keir, A. ^{[2
]}

Preston, I.H. ^{[2
]}

Hilton, K.P. ^{[2
]}

Uren, M.J. ^{[2
]}

Johnson, C.M. ^{[1
]}

机构：

[1] Dept. of Elec. and Electron. Eng., University of Newcastle, Newcastle NE1 7RU, United Kingdom

[2] Def. Evaluation and Research Agency, Great Malvern, Worcs. WR14 3PS, United Kingdom

来源：

Materials Science Forum | 2001年 / 353-356卷

关键词：

Anodes - Crystal defects - Electric potential - Electrolysis - Nondestructive examination - Nucleation - Optical microscopy - Water - X ray analysis;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An initial investigation has shown that the electrolysis of water can occur preferentially at macroscopic defects, including micropipes, where a silicon carbide wafer is used as the anode. It is proposed that observing the location of the resulting streams of bubbles, nucleated at the defects, would form the basis for a simple, non-destructive qualification test of SiC wafers.

引用

页码：303 / 306