Ion implantation effects of microcrystalline and nanocrystalline diamond thin films

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[1] [1,Narayanan, Kannan L.
[2] Soga, Tetsuo
[3] Tokunaga, Tomoharu
[4] Yamaguchi, Masafumi
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Narayanan, K.L. (klnbabu@solid.titech.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 43期
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