Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing

被引：0
|
作者：
Kim, K.N. [1 ]
Jung, S.J. [1 ]
Lee, Y.J. [1 ]
Yeom, G.Y. [1 ]
Lee, S.H. [2 ]
Lee, J.K. [2 ]
机构：
[1] Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, 440-746, Korea, Republic of
[2] Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang, 790-784, Korea, Republic of
来源：
Journal of Applied Physics | 2005年 / 97卷 / 06期
关键词：
This work was supported by National Research Laboratory (NRL) Program of the Korea Ministry of Science and Technology;
D O I：
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摘要：
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