Fracture anisotropy in silicon single crystal

被引:0
|
作者
Ebrahimi, Fereshteh [1 ]
Kalwani, Lakshman [1 ]
机构
[1] Mat. Sci. and Engineering Department, University of Florida, Gainesville, FL 32611, United States
来源
Materials Science and Engineering: A | 1999年 / 268卷 / 1-2期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
24
引用
收藏
页码:116 / 126
相关论文
共 50 条
  • [1] Fracture anisotropy in silicon single crystal
    Ebrahimi, F
    Kalwani, L
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1999, 268 (1-2): : 116 - 126
  • [2] Dynamic deformation and fracture of single crystal silicon: Fracture modes, damage laws, and anisotropy
    Huang, J. Y.
    E, J. C.
    Huang, J. W.
    Sun, T.
    Fezzaa, K.
    Xu, S. L.
    Luo, S. N.
    ACTA MATERIALIA, 2016, 114 : 136 - 145
  • [3] Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
    Li, XP
    Kasai, T
    Nakao, S
    Ando, T
    Shikida, M
    Sato, K
    Tanaka, H
    SENSORS AND ACTUATORS A-PHYSICAL, 2005, 117 (01) : 143 - 150
  • [4] Dynamic fracture in single crystal silicon
    Hauch, JA
    Holland, D
    Marder, MP
    Swinney, HL
    PHYSICAL REVIEW LETTERS, 1999, 82 (19) : 3823 - 3826
  • [5] Fracture toughness of single crystal silicon
    Hayashi, Kunio
    Tsujimoto, Shinji
    Okamoto, Yasunori
    Nishikawa, Tomozo
    Zairyo/Journal of the Society of Materials Science, Japan, 1991, 40 (451) : 405 - 410
  • [6] Effect of crystal orientation on fracture strength and fracture toughness of single crystal silicon
    Ando, T
    Li, XP
    Nakao, S
    Kasai, T
    Shikida, M
    Sato, K
    MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 177 - 180
  • [7] Fracture behaviour of single crystal silicon microstructures
    F. Favalli Meroni
    E. Mazza
    Microsystem Technologies, 2004, 10 : 412 - 418
  • [8] Anisotropy effects on the reliability of single-crystal silicon
    Borrero-Lopez, Oscar
    Vodenitcharova, Tania
    Hoffman, Mark
    SCRIPTA MATERIALIA, 2010, 63 (10) : 997 - 1000
  • [9] Fracture behaviour of single crystal silicon microstructures
    Meroni, FF
    Mazza, E
    DTIP 2003: DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS 2003, 2003, : 329 - 334
  • [10] FRACTAL FRACTURE OF SINGLE-CRYSTAL SILICON
    TSAI, YL
    MECHOLSKY, JJ
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) : 1248 - 1263