Slurry transport during chemical mechanical polishing

被引：0

作者：

Fu, Ming-Nan ^{[1
]}

Liao, Shan-Hui ^{[1
]}

Li, Ching-Chung ^{[2
]}

Chang, Pai-Yu ^{[3
]}

机构：

[1] Department of Industrial Engineering and Management, Chin Min Institute of Technology, 351 Taiwan, Taiwan

[2] Department of Computer Sciences, Chung Cheng Institute of Technology, National Defense University, 335 Taiwan, Taiwan

[3] Department of Product Design, Fortune Institute of Technology, 842 Taiwan, Taiwan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2005年 / 44卷 / 11期

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D O I：

暂无

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摘要：

引用

页码：7843 / 7848

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