Slurry transport during chemical mechanical polishing

被引：0
|
作者：
Fu, Ming-Nan [1 ]
Liao, Shan-Hui [1 ]
Li, Ching-Chung [2 ]
Chang, Pai-Yu [3 ]
机构：
[1] Department of Industrial Engineering and Management, Chin Min Institute of Technology, 351 Taiwan, Taiwan
[2] Department of Computer Sciences, Chung Cheng Institute of Technology, National Defense University, 335 Taiwan, Taiwan
[3] Department of Product Design, Fortune Institute of Technology, 842 Taiwan, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2005年 / 44卷 / 11期
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页码：7843 / 7848
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