Structure analysis of Ge dimer on Si (001) by medium-energy ion scattering blocking profiles from embedded Ge layers

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作者：
Sumitomo, Koji [1 ]
Nishioka, Takashi [1 ]
Ogino, Toshio [1 ]
机构：
[1] NTT Basic Research Lab, Kanagawa, Japan
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1997年 / 15卷 / 3 Pt 1期
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页码：1537 / 1541
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