Experimental and theoretical investigation of properties of a near-surface electron-beam nitrogen plasma

被引:0
作者
Bychkov, V.L. [1 ]
Vasil'ev, M.N. [1 ]
Zuev, A.P. [1 ]
机构
[1] Moskovskij Fiziko-Tekhnicheskij Inst, Moscow, Russia
来源
Kolloidnyj Zhurnal | 1994年 / 56卷 / 04期
关键词
Electron beams - Nitrogen - Numerical methods - Plasma theory - Spectrum analysis - Test facilities;
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摘要
Properties of an electron-beam plasma at 2-10 Torr pressures have been experimentally investigated, using optical multizone spectroscopy (in the 0.35-0.9 micrometer wave range). In this case, spatial temperature distribution and particle excitation were studied. These studies were conducted both with targets and with no targets. The beam has the following parameters: I - 10 A/cm2, E - 30-60 keV. A theoretical model has been constructed. The model calculates the parameters of the plasma during experiment. A conclusion has been made that optical multizone spectroscopy of a non-equilibrium electron-beam plasma is rather promising.
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页码:323 / 333
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