MICROFABRICATION BY ION-BEAM ETCHING.

被引：0
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作者：
Lee, Robert E.
机构：
来源：
Semiconductor International | 1980年 / 3卷 / 01期
关键词：
Compendex;
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学科分类号：
摘要：
INTEGRATED CIRCUIT MANUFACTURE
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页码：73 / 80
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