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- [3] Efficient cleaning of silicon wafers. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 226 : U403 - U403
- [5] ELECTROCHEMICAL METHOD TO MEASURE THE DEFECT-FREE ZONE IN SILICON WAFERS. IBM technical disclosure bulletin, 1983, 26 (05): : 2374 - 2376
- [9] Gettering of copper in bonded silicon wafers. PROCEEDINGS OF THE SEVENTH INTERNATIONAL SYMPOSIUM ON SILICON-ON-INSULATOR TECHNOLOGY AND DEVICES, 1996, 96 (03): : 176 - 182
- [10] STEPS IN DEVELOPING EQUIPMENT TO PROCESS BIGGER WAFERS. JEE. Journal of electronic engineering, 1984, 21 (208): : 69 - 72