QUANTUM WELL INJECTION LASERS GROWN BY MOLECULAR BEAM EPITAXY.

被引：0

作者：

Woodbridge, K.

Blood, P.

Fletcher, E.D.

Hulyer, P.J.

机构：

来源：

Annual Review - Philips Research Laboratories | 1983年

关键词：

MOLECULAR BEAMS - Applications;

D O I：

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学科分类号：

摘要：

MBE is a refined form of vacuum evaporation in which molecular beams of the constituent elements produced from effusion cells impinge upon a heated substrate to produce the required epitaxial layer. The UHV system used in this work is fitted with a sample interlock for substrate transfer and extensive cryopanelling to reduce background gas species. The system has been fully automated with computer control of cell temperatures and shutter operations enabling pre-programming of complex multilayer structures.

引用

页码：50 / 51