STUDY OF EXTRINSIC GETTERING OF EPITAXIAL SUBSTRATES.

被引：0
作者：
Medernach, John W. [1 ]
Wells, Victor A. [1 ]
Witherspoon, Linda L. [1 ]
机构：
[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA
来源：
Semiconductor International | 1987年 / 10卷 / 02期
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D O I：
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学科分类号：
摘要：
29
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页码：106 / 110
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