STUDY OF EXTRINSIC GETTERING OF EPITAXIAL SUBSTRATES.

被引：0
作者：
Medernach, John W. [1 ]
Wells, Victor A. [1 ]
Witherspoon, Linda L. [1 ]
机构：
[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA
来源：
Semiconductor International | 1987年 / 10卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
29
引用
收藏
页码：106 / 110
相关论文
共 50 条
[31]   EPITAXIAL GROWTH OF SUPERCONDUCTING Nb3Ge FILMS ON YSZ SINGLE-CRYSTAL SUBSTRATES. [J].
Asano, Hidefumi ;
Tanabe, Keiichi ;
Katoh, Yujiro ;
Michikami, Osamu .
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 1988, 27 (01) :35-39
[32]   Biomimetic oxidation of organic substrates. [J].
Bäckvall, JE .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 221 :U173-U173
[33]   Grafting of cellulose on nylon substrates. [J].
Nichols, RK ;
Seyfzadeh, B ;
Negulescu, II .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1996, 211 :150-CELL
[34]   ELECTROSTATIC CLEANING AND POLISHING OF SUBSTRATES. [J].
Larson, W.B. ;
Tietze, A.R. .
IBM technical disclosure bulletin, 1983, 26 (01) :399-400
[35]   POWDER COATINGS ON ALUMINUM SUBSTRATES. [J].
Bowden, Champ C. .
1600, (81)
[36]   SUBSURFACE CIRCUITRY ON POLYMERIC SUBSTRATES. [J].
Mace, E.W. .
IBM technical disclosure bulletin, 1984, 27 (05) :2937-2938
[37]   Study of competitive substrates for inter-membrane proteins as means to design new substrates. [J].
Mullin, JM ;
Martin, RJ ;
Gordon, MS .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 228 :U299-U299
[38]   NEW PHOTOACOUSTIC METHOD TO CHARACTERIZE WIDER-GAP EPITAXIAL LAYERS ON NARROWER-GAP SUBSTRATES. [J].
Ohba, Yasuo ;
Mizuta, Masashi ;
Kukimoto, Hiroshi .
1600, (22)
[39]   Study of Cu gettering to cavities in separation by implantation of oxygen substrates [J].
Zhang, M ;
Lin, CL ;
Hemment, PLF ;
Gutjahr, K ;
Gosele, U .
APPLIED PHYSICS LETTERS, 1998, 72 (07) :830-832
[40]   Strain and gettering in epitaxial silicon wafers [J].
Kirscht, FG ;
Shabani, MB ;
Yoshimi, T ;
Kim, SB ;
Snegirev, B ;
Wang, C ;
Williamson, L ;
Takashima, K ;
Taylor, P ;
Lange, D .
SOLID STATE PHENOMENA, 1997, 57-8 :355-363
12345