Run-to-run control of static systems

被引：0
|
作者：
Kosut, Robert L. [1 ]
de Roover, Dick [1 ]
Emami-Naeini, Abbas [1 ]
Ebert, Jon L. [1 ]
机构：
[1] SC Solutions Inc, Santa Clara, United States
来源：
Proceedings of the IEEE Conference on Decision and Control | 1998年 / 1卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：695 / 700
相关论文
共 50 条
  • [41] Robust forecasts and run-to-run control for processes with linear drifts
    Lee, Jay H.
    Kiew, Choon Meng
    JOURNAL OF PROCESS CONTROL, 2009, 19 (04) : 636 - 643
  • [42] Performance evaluation of run-to-run control methods in semiconductor processes
    Zhang, C
    Deng, H
    Baras, JS
    CCA 2003: PROCEEDINGS OF 2003 IEEE CONFERENCE ON CONTROL APPLICATIONS, VOLS 1 AND 2, 2003, : 841 - 848
  • [43] A RLS Run-to-Run Control Approach for Semiconductor Manufacturing Process
    Liu, Shujie
    Zheng, Ying
    Luo, Ming
    Wang, Yanwei
    PROCEEDINGS OF THE 10TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA 2012), 2012, : 2642 - 2646
  • [44] A run-to-run control strategy for polymorphic transformation in pharmaceutical crystallization
    Hermanto, Martin Wijaya
    Braatz, Richard D.
    Chiu, Min-Sen
    PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS, VOLS 1-4, 2006, : 1300 - 1305
  • [45] Run-to-Run Control Utilizing the AVM System in the Solar Industry
    Lin, Li-Ren
    Chiu, Yu-Chen
    Mo, Wei-Cheng
    Kao, Chi-An
    Liu, Tzu-Ming
    Zeng, Deng-Lin
    Cheng, Fan-Tien
    2011 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) AND E-MANUFACTURING AND DESIGN COLLABORATION SYMPOSIUM (EMDC), 2011,
  • [46] A General Harmonic Rule Controller for Run-to-Run Process Control
    He, Fangyi
    Wang, Kaibo
    Jiang, Wei
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2009, 22 (02) : 232 - 244
  • [47] Feedforward control for reduced run-to-run variation in microelectronics manufacturing
    Ruegsegger, S
    Wagner, A
    Freudenberg, JS
    Grimard, DS
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1999, 12 (04) : 493 - 502
  • [48] CPE Run-to-Run Overlay Control for High Volume Manufacturing
    Subramany, Lokesh
    Chung, Woong Jae
    Gutjhar, Karsten
    Garcia-Medina, Miguel
    Sparka, Christian
    Yap, Lipkong
    Demirer, Onur
    Karur-Shanmugam, Ramkumar
    Riggs, Brent
    Ramanathan, Vidya
    Robinson, John C.
    Pierson, Bill
    2015 26TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2015, : 324 - 328
  • [49] Stability and performance analysis of mixed product run-to-run control
    Zheng, Y
    Lin, QH
    Wang, DSH
    Jang, SS
    Hui, K
    JOURNAL OF PROCESS CONTROL, 2006, 16 (05) : 431 - 443
  • [50] Choosing optimal control structure for run-to-run control - A thin film example
    Patel, Nita S.
    Rajagopal, Ramkumar
    2006 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 2006, : 272 - +
12345