THERMAL BEHAVIOR OF B, P AND AS ATOMS IN SUPERSATURATED SI PRODUCED BY ION IMPLANTATION AND PULSED-LASER ANNEALING.

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作者：
ITOH, KAZUO
SASAKI, YOSHISATO
MITSUISHI, TOMOKUNI
MIYAO, MASANOBU
TAMURA, MASAO
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| 1982年 / V 21卷 / N 5期
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页码：245 / 247
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