Change in surface morphology of diamond films deposited by DC plasma glow discharge CVD

被引：0
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作者：
Bacci, T. [1 ]
Borchi, E. [1 ]
Bruzzi, M. [1 ]
Santoro, M. [1 ]
Sciortino, S. [1 ]
机构：
[1] Ingegneria Meccanica e Tecnologie, Industriali, Firenze, Italy
来源：
Materials science & engineering. B, Solid-state materials for advanced technology | 1997年 / B48卷 / 03期
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页码：268 / 278
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