Visible photoluminescence in hydrogenated amorphous silicon grown in microwave plasma from SiH4 strongly diluted with He

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Dian, J.
Valenta, J.
Hala, J.
Poruba, A.
Horvath, P.
Luterova, K.
Gregora, I.
Pelant, I.
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Journal of Applied Physics | / 86卷 / 03期
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