Carrier concentration dependence of photoacoustic signal intensity of silicon

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作者
Kuwahata, Hiroshi [1 ]
Muto, Nobuo [1 ]
Uehara, Fumiya [2 ]
Matsumori, Tokue [1 ]
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[1] Department of Electronics, Faculty of Engineering, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan
[2] Department of Resources and Environmental Science, Faculty of Humanities and Culture, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan
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页码:3168 / 3170
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