KrF lithography for 0.25-μm CMOS/SIMOX pattern fabrication

被引：0
|
作者：
NTT System Electronics Lab, Japan [1 ]
机构：
来源：
NTT R&D | / 4卷 / 379-386期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
相关论文
共 50 条
  • [21] A merged 2.5 V and 3.3 V 0.25-μm CMOS technology
    Kizilyalli, IC
    Huang, R
    Hwang, D
    Kane, B
    Ashton, R
    Kuehne, S
    Deng, X
    Twifford, M
    Martin, E
    Shuttleworth, D
    Wittingham, K
    Lytle, S
    Roy, P
    Olmer, L
    Vaidya, H
    Li, F
    Li, X
    Persson, E
    Massengale, A
    Stirling, L
    Chesire, D
    Steiner, K
    Barba, R
    Thoma, MJ
    Cochran, WT
    MICROELECTRONIC DEVICE TECHNOLOGY II, 1998, 3506 : 175 - 181
  • [22] Nonsilicide source/drain pixel for 0.25-μm CMOS image sensor
    Yaung, DN
    Wuu, SG
    Fang, YK
    Wang, CS
    Tseng, CH
    Liang, MS
    IEEE ELECTRON DEVICE LETTERS, 2001, 22 (02) : 71 - 73
  • [23] GSM transceiver front-end circuits in 0.25-μm CMOS
    Huang, QT
    Orsatti, P
    Piazza, F
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1999, 34 (03) : 292 - 303
  • [24] Miniature 0.25-μm CMOS Distributed Amplifier Using On-Chip Inductors
    Guan, X.
    Jin, Y.
    Huynh, C.
    Nguyen, C.
    2010 IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM, 2010,
  • [25] Design and benchmarking of BCPMOS versus SCPMOS for an evolutionary 0.25-μm CMOS technology
    Vuong, HH
    Eshraghi, SA
    Rafferty, CS
    Hillenius, SJ
    Pinto, MR
    Diodato, PW
    Cong, HI
    Zeitzoff, PM
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1998, 45 (04) : 991 - 993
  • [26] A 300-MHz quadrature direct digital synthesizer/mixer in 0.25-μm CMOS
    Torosyan, A
    Fu, DW
    Willson, AN
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2003, 38 (06) : 875 - 887
  • [27] Design of negative charge pump circuit with polysilicon diodes in a 0.25-μm CMOS process
    Ker, MD
    Chang, CY
    Jiang, HC
    2002 IEEE ASIA-PACIFIC CONFERENCE ON ASIC PROCEEDINGS, 2002, : 145 - 148
  • [28] High-speed direct digital frequency synthesizers in 0.25-μm-CMOS
    Strollo, AGM
    De Caro, D
    Napoli, E
    Petra, N
    PROCEEDINGS OF THE IEEE 2004 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2004, : 163 - 166
  • [29] A 400-MHz processor for the conversion of rectangular to polar coordinates in 0.25-μm CMOS
    Hwang, DD
    Fu, DW
    Willson, AN
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2003, 38 (10) : 1771 - 1775
  • [30] Correlation of prediction to on-orbit SEU performance for a commercial 0.25-μm CMOS SRAM
    Hansen, D. L.
    Jobe, K.
    Whittington, J.
    Shoga, M.
    Sunderland, D. A.
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2007, 54 (06) : 2525 - 2533
12345