[1] Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University, 1515 Kamihama, Tsu, Mie 514-8507, Japan
[2] Photonics Research Laboratory, Mitsubishi Cable Industries, Ltd., 4-3 Ikejiri, Itami, Hyogo 664-0027, Japan
[3] Sagamihara Plant, Nikon Co., Ltd., 1-10-1 Asamizodai, Sagamihara, Kanagawa 228-0828, Japan
[4] Department of Vacuum UV Photoscience, Institute for Molecular Science, Myodaiji, Okazaki, Aichi 444-8585, Japan