PATTERN DEFINITION FOR THE MANUFACTURE OF LARGE-SCALE INTEGRATED CIRCUITS.

被引：0

作者：

Heslop, C.J.

Hines, R.E.

Woodward, J.W.

机构：

来源：

Post Office Electrical Engineers Journal | 1981年 / 73卷 / pt 4期

关键词：

Compendex;

D O I：

暂无

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学科分类号：

摘要：

INTEGRATED CIRCUIT MANUFACTURE

引用

页码：208 / 215

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