PATTERN DEFINITION FOR THE MANUFACTURE OF LARGE-SCALE INTEGRATED CIRCUITS.

被引：0
|
作者：
Heslop, C.J.
Hines, R.E.
Woodward, J.W.
机构：
来源：
Post Office Electrical Engineers Journal | 1981年 / 73卷 / pt 4期
关键词：
Compendex;
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摘要：
INTEGRATED CIRCUIT MANUFACTURE
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页码：208 / 215
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