High-speed metal-semiconductor-metal photodetectors fabricated on SOI-substrates

被引：0
|
作者：
Honkanen, K. [1 ]
Hakkarainen, N. [1 ]
Määttä, K. [2 ]
Kilpelä, A. [2 ]
Kuivalainen, P. [1 ]
机构：
[1] Helsinki University of Technology, Dept. of Elec. and Commun. Eng., Electron Physics Laboratory, P.O. Box 3000, FIN-02015 Hut, Finland
[2] University of Oulu, Dept. Elec. Eng. and Infotech Oulu, Electronics Laboratory, P.O. Box 444, FIN-90571 Oulu, Finland
来源：
Physica Scripta T | 1999年 / 79卷
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摘要：
7
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页码：127 / 130
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