Laser physico-chemical vapour deposition of cubic boron nitride thin films

被引:0
|
作者
机构
[1] Molian, P.A.
来源
Molian, P.A. | 1600年 / Chapman & Hall Ltd, London, United Kingdom卷 / 29期
关键词
Adherence - Borazine - Film quality - Physicochemical vapor deposition - X ray diffraction;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] Calcium phosphate thin films synthesized by pulsed laser deposition: Physico-chemical characterization and in vitro cell response
    Mihailescu, IN
    Torricelli, P
    Bigi, A
    Mayer, I
    Iliescu, M
    Werckmann, J
    Socol, G
    Miroiu, F
    Cuisinier, F
    Elkaim, R
    Hildebrand, G
    APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 344 - 348
  • [42] Laser-induced chemical vapour deposition of thin films in microelectronics
    Reisse, G.
    Gaensicke, F.
    Fischer, A.
    Zimmer, K.
    Zscherpe, G.
    International Conference of Micro Electro, Opto, Mechanic Systems and Components, 1990,
  • [43] DEPOSITION OF CUBIC BORON-NITRIDE THIN-FILMS BY ION-BEAM-ENHANCED DEPOSITION
    TANABE, N
    HAYASHI, T
    IWAKI, M
    DIAMOND AND RELATED MATERIALS, 1992, 1 (08) : 883 - 890
  • [44] PULSED-LASER DEPOSITION OF CUBIC BORON-NITRIDE FILMS ON SILICON SUBSTRATES
    QIAN, F
    NAGABUSHNAM, V
    SINGH, RK
    APPLIED PHYSICS LETTERS, 1993, 63 (03) : 317 - 319
  • [45] Synthesis and characterization of cubic boron nitride thin films
    Wang, Ming'e, 1600, Science Press (34):
  • [46] Optical properties of cubic boron nitride thin films
    School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
    不详
    Gongneng Cailiao, 2006, SUPPL. (273-275):
  • [47] Surface properties of cubic boron nitride thin films
    Deng, Jinxiang
    Chen, Guanghua
    APPLIED SURFACE SCIENCE, 2006, 252 (22) : 7766 - 7770
  • [48] Crystallographic texture in cubic boron nitride thin films
    Medlin, DL
    Friedmann, TA
    Mirkarimi, PB
    Cardinale, GF
    McCarty, KF
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (07) : 3567 - 3571
  • [49] Synthesis and properties of cubic boron nitride thin films
    Feldermann, H
    Sebastian, M
    Merk, R
    Restle, M
    Ronning, C
    Hofsass, H
    HARD COATINGS: BASED ON BORIDES, CARBIDES & NITRIDES: SYNTHESIS, CHARACTERIZATION & APPLICATIONS, 1998, : 143 - 152
  • [50] Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor deposition
    Yang Hang-Sheng
    ACTA PHYSICA SINICA, 2006, 55 (08) : 4238 - 4246