Thin Film Pressure Transducer with a Planar Elastic Element.

被引：0

作者：

Hegner, Frank ^{[1
]}

机构：

[1] Endress & Hauser GmbH, West Ger, Endress & Hauser GmbH, West Ger

来源：

TM. Technisches Messen | 1985年 / 52卷 / 10期

关键词：

SENSORS - Components - STRAIN GAGES - Applications;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Here is presented a metal thin film strain gauge featuring highly attractive technical data and ease of production. Basis of the sensor is a 4 multiplied by 4 inch CuBe sheet substrate which leads to 16 sensor elements by standard thin film technology. Details of the thin film system, pattern generation, offset compensation, assembly, passivation, and end test are given. The thin film sensor element is completed with a pressure determining diaphragm to a pressure sensor.

引用

页码：378 / 382

共 50 条

[41] MULTIFUNCTIONAL THIN-FILM TRANSDUCER OF PHYSICAL QUANTITIES
KAZARYAN, AA
MEASUREMENT TECHNIQUES USSR, 1994, 37 (03): : 283 - 288
[42] Design and performance of a recessed thin film inductive transducer
Zak, BS
Curland, N
Giusti, JH
Ash, KP
Cameron, GP
IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (01) : 74 - 79
[43] The thin dielectric film capacitive displacement transducer to nanometer
Castelli, F
WHERE INSTRUMENTATION IS GOING - CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 1998, : 150 - 153
[44] Piezoelectric Thin Film Platform For Ultrasound Transducer Arrays
Klee, M.
Mauczok, R.
van Heesch, Ch
Boots, H.
de Wild, M.
op het Veld, B.
Soer, W.
Schmitz, G.
Mleczko, M.
2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, : 196 - 199
[45] OPERATION CHARACTERISTICS OF A THIN-FILM CDSE TRANSDUCER
DEY, SK
SINGH, FB
THIN SOLID FILMS, 1972, 12 (01) : 89 - &
[46] LOW-COST PRESSURE FORCE TRANSDUCER WITH SILICON THIN-FILM STRAIN-GAUGES
GERMER, W
TODT, W
SENSORS AND ACTUATORS, 1983, 4 (02): : 183 - 189
[47] A THIN-FILM FOCUSING TRANSDUCER FOR ACOUSTIC MICROSCOPY
DOROZHKIN, LM
DOROSHENKO, VS
KETSKO, VA
KUZNETSOV, NT
MASLOV, K
ACOUSTICAL PHYSICS, 1994, 40 (03) : 351 - 355
[48] The thin dielectric film capacitive displacement transducer to nanometer
Castelli, F
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2001, 50 (01) : 106 - 110
[49] A pressure transducer using a metallic tuning fork with thin film piezoelectric drive and pick-up
Jones, BE
Cheshmehdoost, A
Barker, AJ
Mookherjee, PB
Randall, DS
Rakowski, RT
Rees, D
Crowther, SN
Fry, PW
Rudkin, MJ
SENSORS AND THEIR APPLICATIONS VIII, 1997, : 77 - 82
[50] DIAPHRAGM-TYPE SPUTTERED PLATINUM THIN-FILM STRAIN-GAUGE PRESSURE TRANSDUCER
NAYAK, MM
GUNASEKARAN, N
MUTHUNAYAGAM, AE
RAJANNA, K
MOHAN, S
MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (12) : 1319 - 1322

← 1 2 3 4 5 →