Thin Film Pressure Transducer with a Planar Elastic Element.

被引：0
|
作者：
Hegner, Frank [1 ]
机构：
[1] Endress & Hauser GmbH, West Ger, Endress & Hauser GmbH, West Ger
来源：
TM. Technisches Messen | 1985年 / 52卷 / 10期
关键词：
SENSORS - Components - STRAIN GAGES - Applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Here is presented a metal thin film strain gauge featuring highly attractive technical data and ease of production. Basis of the sensor is a 4 multiplied by 4 inch CuBe sheet substrate which leads to 16 sensor elements by standard thin film technology. Details of the thin film system, pattern generation, offset compensation, assembly, passivation, and end test are given. The thin film sensor element is completed with a pressure determining diaphragm to a pressure sensor.
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页码：378 / 382
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