LASER SCRIBING AND DRILLING OF CERAMIC SUBSTRATES.

被引：0
|
作者：
Belland, Robert
机构：
来源：
Electronic Packaging and Production | 1975年 / 15卷 / 01期
关键词：
LASER SCRIBING;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Three techniques used for substrate separation are compared. These are: prescoring, sawing, and laser scribing. The latter has proved to be an effective tool when care is taken to minimize the degrading properties of slag by following basic guidelines enabling maximum yields and minimum cost in microcircuit manufacturing.
引用
收藏
页码：56 / 58
相关论文
共 50 条
  • [1] Laser Scribing for Facet Fabrication of InGaN MQW Diode Lasers on Sapphire Substrates
    van Look, Jan-Robert
    Einfeldt, Sven
    Krueger, Olaf
    Hoffmann, Veit
    Knauer, Arne
    Weyers, Markus
    Vogt, Patrick
    Kneissl, Michael
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2010, 22 (06) : 416 - 418
  • [2] Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels
    Tseng, Shih-Feng
    Hsiao, Wen-Tse
    Huang, Kuo-Cheng
    Chiang, Donyau
    Chen, Ming-Fei
    Chou, Chang-Pin
    APPLIED SURFACE SCIENCE, 2010, 257 (05) : 1487 - 1494
  • [3] Scribing of thin sapphire substrates with a 266-nm Q-switched solid-state laser
    Rea, EC
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III, 2004, 5339 : 231 - 240
  • [4] An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
    Chen, Ruqi
    Chang, Shing
    Lei, Shuting
    MICROMACHINES, 2023, 14 (11)
  • [5] Machine Learning Aided Optimization of P1 Laser Scribing Process on Indium Tin Oxide Substrates
    Karade, Vijay C.
    Kim, Saewoong
    Jeong, Inyoung
    Ko, Min Jae
    Park, Joo Hyung
    Cho, Jun-Sik
    Hwang, Inchan
    Gwak, Jihye
    Sutar, Santosh S.
    Dongale, Tukaram D.
    Yun, Jae Ho
    Kim, Kihwan
    Eo, Young-Joo
    ADVANCED INTELLIGENT SYSTEMS, 2024, 6 (06)
  • [6] Thermal stress analysis on laser scribing of glass
    Yamamoto, Koji
    Hasaka, Noboru
    Morita, Hideki
    Ohmura, Etsuji
    JOURNAL OF LASER APPLICATIONS, 2008, 20 (04) : 193 - 200
  • [7] Partial growth of crack in laser scribing of glass
    Yamamoto, Koji
    Hasaka, Noboru
    Morita, Hideki
    Ohmura, Etsuji
    Seimitsu Kogaku Kaishi, 2007, 8 (917-923): : 917 - 923
  • [8] Crack Propagation Analysis in Laser Scribing of Glass
    Yahata, Keisuke
    Yamamoto, Koji
    Ohmura, Etsuji
    JOURNAL OF LASER MICRO NANOENGINEERING, 2010, 5 (02): : 109 - 114
  • [9] Laser scribing on polycrystalline diamond compound blade
    Li, ZG
    Shi, GQ
    Wang, JY
    LASER PROCESSING OF MATERIALS AND INDUSTRIAL APPLICATIONS II, 1998, 3550 : 307 - 310
  • [10] Laser scribing of ITO and organic solar cells
    Haenel, Jens
    Keiper, Bernd
    Scholz, Christian
    Clair, Maurice
    THIN FILM SOLAR TECHNOLOGY II, 2010, 7771
12345