MOCVD of advanced dielectric and ferroelectric films by liquid delivery

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Advanced Technology Materials, Inc, Danbury, United States [1 ]
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Integr Ferroelectr | / 1 -4 pt 2卷 / 109-118期
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Number:; MDA972-93-C-0033; Acronym:; DARPA; Sponsor: Defense Advanced Research Projects Agency;
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