Low-pressure Plasma Processes in Semiconductor Industry.

被引：0
作者：
Bell, G.
机构：
来源：
Elektronik Produktion & Prueftechnik | 1982年 / 11期
关键词：
Compendex;
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学科分类号：
摘要：
PLASMAS - Applications
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页码：741 / 744
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