Vapor phase deposition technology for inorganic and organic devices

被引：0
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作者：
Deschler, Marc [1 ]
机构：
[1] Aixtron AG, Kackertstr. 15-17, 52072 Aachen, Germany
来源：
Vide: Science, Technique et Applications | 2003年 / 3 4卷 / 305期
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摘要：
13
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页码：469 / 483
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