ACCURATE IMAGE MODELING FOR SUBMICRON CD OPTICAL CONTROL.

被引：2
|
作者：
Guillaume, M.E. [1 ]
Livrozet, P. [1 ]
Buevoz, J.L. [1 ]
Alcouffe-Noailly, N. [1 ]
机构：
[1] CNET, Meylan, Fr, CNET, Meylan, Fr
来源：
Microelectronic Engineering | 1987年 / 6卷 / 1-4期
关键词：
D O I：
10.1016/0167-9317(87)90098-0
中图分类号：
学科分类号：
摘要：
LITHOGRAPHY
引用
收藏
页码：631 / 636
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