Comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering

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作者：
Logothetidis, S. [1 ]
Charitidis, C. [1 ]
Patsalas, P. [1 ]
Kehagias, Th. [1 ]
机构：
[1] Aristotle Univ of Thessaloniki, Thessaloniki, Greece
来源：
Diamond and Related Materials | 1999年 / 8卷 / 02期
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页码：410 / 414
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