Atomic force microscope as a tool for metal surface modifications

被引：0

作者：

Goebel, H. ^{[1
]}

von Blanckenhagen, P. ^{[1
]}

机构：

[1] Inst fuer Materialforschung I, Karlsruhe, Germany

来源：

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 1995年 / 13卷 / 03期

关键词：

Chemical modification - Microstructure - Plastic deformation - Polycrystalline materials - Scanning electron microscopy - Surfaces - Thin films - Tribology - Wear of materials;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Atomic force microscopy has been used for direct surface modification and imaging of bulk polycrystalline Au, thin Au films, and a microstructure. Single surface scratches and periodic profiles as well as more complicated structures have been produced. The underlying process is discussed in terms of abrasive wear such as microploughing and microcutting as well as of the temperature rise during modification. In the case of plastic deformation and slow sliding one can estimate a temperature increase of about 0.6 μK for typical structurization parameters. The method described here is promising as regards the structurization of various materials and fundamental studies in tribology.

引用

页码：1247 / 1251