Stability of Plasma Posttreated TiN Films Prepared by Alternating Cyclic Pulses of Tetrakis-Dimethylamido-Titanium and Ammonia

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[1] Park, Seoung Gon
[2] Kim, Do-Heyoung
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Kim, D.-H. (kdhh@chonnam.ac.kr) | 1600年 / Japan Society of Applied Physics卷 / 43期
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