Enhanced retention characteristics of Pb(Zr, Ti)O3 capacitors by ozone treatment

被引：0
作者：
Lee, K.-M. [1 ]
An, H.-G. [1 ]
Lee, J.-K. [1 ]
Lee, Y.-T. [1 ]
Lee, S.-W. [1 ]
Joo, S.-H. [1 ]
Nam, S.-D. [1 ]
Park, K.-S. [1 ]
Lee, M.-S. [1 ]
Park, S.-O. [1 ]
Kang, H.-K. [1 ]
Moon, J.-T. [1 ]
机构：
[1] Process Development Team, Semiconductor R and D Division, Samsung Electronics Co., San 24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do, Korea, Republic of
来源：
| 2001年 / Japan Society of Applied Physics卷 / 40期
关键词：
D O I：
10.1143/jjap.40.4979
中图分类号：
学科分类号：
摘要：
Capacitors
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