Enhanced retention characteristics of Pb(Zr, Ti)O3 capacitors by ozone treatment

被引：0

作者：

Lee, K.-M. ^{[1
]}

An, H.-G. ^{[1
]}

Lee, J.-K. ^{[1
]}

Lee, Y.-T. ^{[1
]}

Lee, S.-W. ^{[1
]}

Joo, S.-H. ^{[1
]}

Nam, S.-D. ^{[1
]}

Park, K.-S. ^{[1
]}

Lee, M.-S. ^{[1
]}

Park, S.-O. ^{[1
]}

Kang, H.-K. ^{[1
]}

Moon, J.-T. ^{[1
]}

机构：

[1] Process Development Team, Semiconductor R and D Division, Samsung Electronics Co., San 24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do, Korea, Republic of

来源：

| 2001年 / Japan Society of Applied Physics卷 / 40期

关键词：

D O I：

10.1143/jjap.40.4979

中图分类号：

学科分类号：

摘要：

Capacitors

引用

共 50 条

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