Permanent magnet micromotors on silicon substrates

被引：47

作者：

Wagner, B. ^{[1
]}

Kruetzer, M. ^{[1
]}

Beneceke, W. ^{[1
]}

机构：

[1] Fraunhofer Inst for Silicon, Technology, Berlin, Germany

来源：

Journal of Microelectromechanical Systems | 1993年 / 2卷 / 01期

关键词：

Magnets - Rare earth elements;

D O I：

10.1109/84.232591

中图分类号：

学科分类号：

摘要：

Different types of sliding, rolling, or rotating micromotors with rare-earth-based permanent magnet rotors are presented. The magnets move synchronously with rotating or traveling magnetic fields generated by 25-micrometer thick gold curent lines on silicon substrates. The magnets are guided in channels or openings in the silicon itself or in additional glass layers. For magnets with a typical dimension of 1 mm, forces and torques of 150 μN and 100 nNm could be achieved. Maximum velocities of 24 cm//s and a rotation frequency of 2000 rpm have been measured.

引用

页码：23 / 29