Numerical simulation of metal plasma-immersion ion implantation and deposition on a cone

被引:0
|
作者
机构
[1] Cornet, Christophe
[2] Kwok, Dixon T. K.
[3] Bilek, M.M.M.
[4] McKenzie, D.R.
来源
| 1600年 / American Institute of Physics Inc.卷 / 96期
关键词
Number:; -; Acronym:; ARC; Sponsor: Australian Research Council;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] Current control for magnetized plasma in direct-current plasma-immersion ion implantation
    Tang, D
    Chu, PK
    APPLIED PHYSICS LETTERS, 2003, 82 (13) : 2014 - 2016
  • [22] Metal plasma immersion ion implantation and deposition (MPIIID): chromium on magnesium
    Bruckner, J
    Gunzel, R
    Richter, E
    Moller, W
    SURFACE & COATINGS TECHNOLOGY, 1998, 104 : 227 - 230
  • [23] Lateral homogeneity variation in metal plasma immersion ion implantation and deposition
    Huber, P
    Manova, D
    Mändl, S
    Rauschenbach, B
    SURFACE & COATINGS TECHNOLOGY, 2002, 151 : 355 - 358
  • [24] Metal plasma immersion ion implantation and deposition (MPIIID): chromium on magnesium
    Brueckner, J.
    Guenzel, R.
    Richter, E.
    Moeller, W.
    Surface and Coatings Technology, 1998, 103-104 (01): : 227 - 230
  • [25] High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma
    Ryabchikov, A. I.
    Ryabchikov, I. A.
    Stepanov, I. B.
    Usov, Yu. P.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (15): : 6523 - 6525
  • [26] Numerical simulation of magnetic field enhanced plasma immersion ion implantation
    Kostov, K. G.
    Barroso, J. J.
    Ueda, M.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (19-20): : 8398 - 8402
  • [27] High frequency short-pulsed plasma-immersion ion implantation or deposition (HFSPPI3D)
    Ryabchikov, A. I.
    Ryabchikov, I. A.
    Stepanov, I. B.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (19-20): : 8610 - 8614
  • [28] Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation
    Lin, Yu-Hsien
    Wu, Yung-Chun
    You, Hsin-Chiang
    Chen, Chun-Hao
    Chen, Ping-Hua
    Tsai, Yi-He
    Yang, Yi-Yun
    Chang-Liao, K. S.
    ENERGIES, 2014, 7 (06) : 3653 - 3663
  • [29] Effects of nitrogen and argon plasma-immersion ion implantation on silicon and its oxidation
    Rajkumer
    Kumar, M
    George, PJ
    Mukherjee, S
    Chari, KS
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 253 - 257
  • [30] Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation
    Burdyukh, Sergey
    Berezina, Olga
    Pergament, Alexander
    ADVANCES IN CONDENSED MATTER PHYSICS, 2018, 2018