Reaction of hydrogen with neutron-irradiation-induced defects in crystalline silicon

被引：0
|
作者：
Wang, Qiyuan [1 ]
Lin, Lanying [1 ]
Wang, Jianhua [1 ]
Deng, Huifang [1 ]
Tan, Liwen [1 ]
Wang, Jun [1 ]
Cai, Tianhai [1 ]
Yu, Yuanhuan [1 ]
机构：
[1] Mat. Sci. Cent., Inst. of Semi-conduct., Chinese Acad. of Sci., Beijing 100083, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 01期
关键词：
Crystalline silicon - Infrared adsorption;
D O I：
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学科分类号：
摘要：
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页码：43 / 48
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