X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates

被引:0
作者
Bauer, A. [1 ]
Kräusslich, J. [1 ]
Köcher, B. [1 ]
Goetz, K. [1 ]
Fissel, A. [2 ]
Richter, W. [2 ]
机构
[1] Institute of Optics and Quantumelectronics, Friedrich Schiller University of Jena, Max-Wien-Platz 1, D-07743 Jena, Germany
[2] Institute of Solid State Physics, Friedrich Schiller University of Jena, Max-Wien-Platz 1, D-07743 Jena, Germany
来源
Materials Science and Engineering B: Solid-State Materials for Advanced Technology | 1999年 / 61卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:179 / 182
相关论文
共 50 条
[21]   Defect investigations of SiCGe epilayer grown on 6H-SiC [J].
Li Lianbi ;
Chen Zhiming ;
Yang Ying ;
Li Jia ;
Wang Ning .
SURFACE AND INTERFACE ANALYSIS, 2011, 43 (05) :881-883
[22]   UV photoemission study of heteroepitaxial AlGaN films grown on 6H-SiC [J].
Benjamin, MC ;
Bremser, MD ;
Weeks, TW ;
King, SW ;
Davis, RF ;
Nemanich, RJ .
APPLIED SURFACE SCIENCE, 1996, 104 :455-460
[23]   ALD Al2O3 passivated MBE-grown AlGaN/GaN HEMTs on 6H-SiC [J].
Kim, D. H. ;
Kumar, V. ;
Chen, G. ;
Dabiran, A. M. ;
Wowchak, A. M. ;
Osinsky, A. ;
Adesida, I. .
ELECTRONICS LETTERS, 2007, 43 (02) :127-128
[24]   A study of thick 3C-SiC epitaxial layers grown on 6H-SIC substrates by sublimation epitaxy in vacuum [J].
Lebedev, A. A. ;
Zelenin, V. V. ;
Abramov, P. L. ;
Bogdanova, E. V. ;
Lebedev, S. P. ;
Nel'son, D. K. ;
Razbirin, B. S. ;
Shcheglov, M. P. ;
Tregubova, A. S. ;
Suvajarvi, M. ;
Yakimova, R. .
SEMICONDUCTORS, 2007, 41 (03) :263-265
[25]   Defects in (111) 3C-SiC layers grown at different temperatures by VLS and CVD on 6H-SiC substrates [J].
Marinova, Maya ;
Jegenyes, Nikoletta ;
Andreadou, Ariadne ;
Mantzari, Alkyoni ;
Lorenzzi, Jean ;
Ferro, Gabriel ;
Polychroniadis, Efstathios K. .
2010 WIDE BANDGAP CUBIC SEMICONDUCTORS: FROM GROWTH TO DEVICES, 2010, 1292 :95-+
[26]   A study of thick 3C-SiC epitaxial layers grown on 6H-SiC substrates by sublimation epitaxy in vacuum [J].
A. A. Lebedev ;
V. V. Zelenin ;
P. L. Abramov ;
E. V. Bogdanova ;
S. P. Lebedev ;
D. K. Nel’son ;
B. S. Razbirin ;
M. P. Shcheglov ;
A. S. Tregubova ;
M. Suvajarvi ;
R. Yakimova .
Semiconductors, 2007, 41 :263-265
[27]   GAN GROWN ON HYDROGEN PLASMA CLEANED 6H-SIC SUBSTRATES [J].
LIN, ME ;
STRITE, S ;
AGARWAL, A ;
SALVADOR, A ;
ZHOU, GL ;
TERAGUCHI, N ;
ROCKETT, A ;
MORKOC, H .
APPLIED PHYSICS LETTERS, 1993, 62 (07) :702-704
[28]   Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates [J].
Zelenin, VV ;
Lebedev, AA ;
Starobinets, SM ;
Chelnokov, VE .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 46 (1-3) :300-303
[29]   Observations of inhomogeneity of 3C-SiC layers grown on 6H-SiC substrates by using scanning internal photoemission microscopy [J].
Shiojima, Kenji ;
Mishina, Naoki ;
Ichikawa, Naoto ;
Kato, Masashi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (04)
[30]   Surface morphology and strain of GaN layers grown using 6H-SiC(0001) substrates with different buffer layers [J].
Einfeldt, S ;
Reitmeier, ZJ ;
Davis, RF .
JOURNAL OF CRYSTAL GROWTH, 2003, 253 (1-4) :129-141