Preparing conductive transparent ITO films on glass at 200°C by RF and DC magnetron sputtering

被引：0
|
作者：
Ishida, T. [1 ]
Kobayashi, H. [1 ]
Mochizuki, S. [1 ]
Tabata, O. [1 ]
机构：
[1] Osaka National Research Institute, Ikeda, Osaka 563-8577, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2001年 / 44卷 / 06期
关键词：
D O I：
10.3131/jvsj.44.588
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：588 / 591
相关论文
共 50 条
  • [31] Transparent conductive Tb-doped ZnO films prepared by rf reactive magnetron sputtering
    Fang, ZB
    Tan, YS
    Gong, HX
    Zhen, CM
    He, ZW
    Wang, YY
    MATERIALS LETTERS, 2005, 59 (21) : 2611 - 2614
  • [32] Synthesis of hydrogen-doped zinc oxide transparent conductive films by RF magnetron sputtering
    Takahashi, Ikki
    Hayashi, Yasuaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (01)
  • [33] Conductive and transparent Bi-doped ZnO thin films prepared by rf magnetron sputtering
    Jiang, Minhong
    Liu, Xinyu
    Wang, Hua
    SURFACE & COATINGS TECHNOLOGY, 2009, 203 (24): : 3750 - 3753
  • [34] Synthesis of hydrogen-doped zinc oxide transparent conductive films by RF magnetron sputtering
    Department of Electronics, Kyoto Institute of Technology, Kyoto
    606-8585, Japan
    Jpn. J. Appl. Phys., 1 Supplement
  • [35] TRANSPARENT AND CONDUCTIVE THIN-FILMS OF ZNO FOR PHOTOVOLTAIC APPLICATIONS PREPARED BY RF MAGNETRON SPUTTERING
    SCHROPP, REI
    MATOVICH, CE
    BHAT, PK
    MADAN, A
    CONFERENCE RECORD OF THE TWENTIETH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1988, VOLS 1-2, 1988, : 273 - 276
  • [36] ITO thin films prepared by gas-timing RF magnetron sputtering for transparent flexible antenna
    Prajuabwan, Pakorn
    Porntheeraphat, Supanit
    Klamchuen, Annop
    Nukeaw, Jiti
    2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 370 - +
  • [37] Effects of heat-treatment on the properties of ITO films on transparent polyimide substrates by RF magnetron sputtering
    Kim, Hae-Chan
    Cho, Hyun
    Kim, Jin-Kon
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2020, 30 (01): : 12 - 16
  • [38] Fabrication and characterization of c-axis oriented transparent conductive nanocrystalline AZO thin films by RF magnetron sputtering
    Fang, GJ
    Li, DJ
    Yao, BL
    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING, 2002, 4919 : 405 - 411
  • [39] Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering
    Fang, GJ
    Li, DJ
    Yao, BL
    VACUUM, 2002, 68 (04) : 363 - 372
  • [40] Transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering at low temperature
    Bie, X.
    Lu, J. G.
    Gong, L.
    Lin, L.
    Zhao, B. H.
    Ye, Z. Z.
    APPLIED SURFACE SCIENCE, 2009, 256 (01) : 289 - 293
12345