Doping effect of SnO2 on gas sensing characteristics of sputtered ZnO thin film chemical sensor

被引：0
|
作者：
Nanto, H. [1 ]
Morita, T. [1 ]
Habara, H. [1 ]
Kondo, K. [1 ]
Douguchi, Y. [1 ]
Minami, T. [1 ]
机构：
[1] Kanazawa Inst of Technology, Ishikawa, Japan
来源：
Sensors and Actuators, B: Chemical | 1996年 / B36卷 / 1 -3 pt 2期
关键词：
Alcohols - Magnetron sputtering - Semiconducting tin compounds - Semiconductor doping - Thin films - Zinc oxide;
D O I：
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学科分类号：
摘要：
The SnO2 content dependence of the sensitivity of sputtered SnO2-doped ZnO thin film chemical sensor is studied for various gases. It is found that the SnO2(78 wt%)-doped ZnO thin film chemical sensor exhibits a high sensitivity and good selectivity for C2H5OH gas. The sensitivity of the SnO2(78 wt%)-doped ZnO thin film chemical sensor responds to the freshness change of alcohols, indicating that the sensor is useful for freshness detection of alcohols.
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页码：384 / 387
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