Innovative technology for material deposition in manufacturing electronics

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[1] Martin, J.
[2] Schoeppler, W.
[3] Creagh, Linda T.
来源
Martin, J. | / National Chiao Tung University, Taiwan; Air Force Office of Scientific Research; Color Imaging Industry Promotion Office/Industrial Dev. Bureau; Electronics Research and Service Organization; Ministry of Education; et al卷 / Society for Information Display期
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Theoretical; (THR); -; Experimental; (EXP);
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摘要
Ink Jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. In response to requirements for dispensing novel electronic fluids, we are developing next generation jetting technology based on our silicon MEMS technology with a three-dimensional silicon technology and a piezo based pumping chamber integrated into the chip structure. Examples of opportunities and applications in electronics packaging for MEMS-based ink jet technology will be presented.
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