Plasma assisted coating of parts at low temperature

The deposition of wear resistant coatings is possible nowadays at low temperature by the Plasma Assisted CVD process using metal organic precursors. Thus a coating of temperature sensitive materials like aluminum, magnesium and polymer at low temperature is realized. The wear resistant coatings TiCN and ZrCN were deposited on light metals at a temperature below 160 °C. The mechanical properties of the layers show the potential of the coatings for parts with wear and friction. The surface hardness, the abrasive wear and the friction value are improved compared to the properties of substrate material and steel. Transparent BCN-coatings can be used as scratch resistant coatings on polymers like polycarbonate. The layers offers good transmission by high hardness.