Transport of Dopant Gas during Silicon Epitaxial Thin-Film Growth in a Horizontal Reactor

被引：0
|
作者：
机构：
来源：
Kagaku Kogaku Ronbunshu | / 6卷 / 772期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] DESIGN CONDISERATIONS ON EPITAXIAL GROWTH OF SILICON FROM SILANE IN A HORIZONTAL REACTOR
    EVERSTEIJN, FC
    PEEK, HL
    PHILIPS RESEARCH REPORTS, 1970, 25 (06): : 472 - +
  • [22] Chirped porous silicon reflectors for thin-film epitaxial silicon solar cells
    Kuzma-Filipek, Izabela J.
    Duerinckx, Filip
    Van Kerschaver, Emmanuel
    Van Nieuwenhuysen, Kris
    Beaucarne, Guy
    Poortmans, Jef
    Journal of Applied Physics, 2008, 104 (07):
  • [23] THE ROLE OF HYDRIDE COVERAGE IN SURFACE-LIMITED THIN-FILM GROWTH OF EPITAXIAL SILICON AND GERMANIUM
    ERES, G
    SHARP, JW
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (12) : 7241 - 7250
  • [24] Chirped porous silicon reflectors for thin-film epitaxial silicon solar cells
    Kuzma-Filipek, Izabela J.
    Duerinckx, Filip
    Van Kerschaver, Emmanuel
    Van Nieuwenhuysen, Kris
    Beaucarne, Guy
    Poortmans, Jef
    JOURNAL OF APPLIED PHYSICS, 2008, 104 (07)
  • [25] Instability of diborane gas in silicon epitaxial film growth
    Habuka, H
    Akiyama, S
    Otsuka, T
    Qu, WF
    JOURNAL OF CRYSTAL GROWTH, 2000, 209 (04) : 807 - 815
  • [26] THIN-FILM GROWTH WITH SUPERSONIC GAS JETS
    HO, W
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 104 - PHYS
  • [27] Flatness deterioration of silicon epitaxial film formed in a horizontal single-wafer epitaxial reactor II
    Onoe, Atsushi
    Yoshino, Takashi
    Imai, Katsuhiro
    Imaeda, Minoru
    Chikuma, Kiyofumi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2002, 41 (09): : 5692 - 5696
  • [28] Flatness deterioration of silicon epitaxial film formed in a horizontal single-wafer epitaxial reactor II
    Habuka, H
    Fukaya, S
    Sawada, A
    Takeuchi, T
    Aihara, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (09): : 5692 - 5696
  • [29] Epitaxial growth of pentacene thin-film phase on alkali halides
    Kiyomura, T.
    Nemoto, T.
    Yoshida, K.
    Minari, T.
    Kurata, H.
    Isoda, S.
    THIN SOLID FILMS, 2006, 515 (02) : 810 - 813
  • [30] EPITAXIAL-GROWTH OF THIN-FILM EVAPORATED FROM POLYETHYLENE
    HATTORI, Y
    ASHIDA, M
    WATANABE, T
    JOURNAL OF ELECTRON MICROSCOPY, 1972, 21 (04): : 334 - 334
12345