Development of 4-inch Fe-doped InP substrate using VB method

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作者：
Hashio, Katsushi
Hosaka, Noriyuki
Matsushima, Masato
Sakuraba, Takashi
Kawasake, Tomohiro
Nakai, Ryusuke
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SEI Technical Review | 2003年 / 56期
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3
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页码：41 / 45
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